@article{0b0b7764153e4705a1278839c9ab9337,
title = "Fabrication of mechanical structures in p-type silicon using electrochemical etching",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "H Ohji and PJ French and K Tsutsumi",
year = "2000",
language = "Undefined/Unknown",
volume = "82",
pages = "254--258",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}