Fabrication of mechanical structures using macro-porous silicon

H Ohji, PJ French, S Izuo, K Tsutsumi

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	M Elwenspoek
Place of Publication	Dordrecht
Publisher	Kluwer
Pages	95-100
Number of pages	6
ISBN (Print)	0-7923-7012-0
Publication status	Published - 2001
Event	Sensor Technology Conference 2001, Enschede - Dordrecht Duration: 14 May 2001 → 15 May 2001

Name
Publisher	Kluwer

Conference	Sensor Technology Conference 2001, Enschede
Period	14/05/01 → 15/05/01

Keywords

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title = "Fabrication of mechanical structures using macro-porous silicon",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "H Ohji and PJ French and S Izuo and K Tsutsumi",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-7923-7012-0",

publisher = "Kluwer",

pages = "95--100",

editor = "{M Elwenspoek}",

booktitle = "Proceedings",

note = "Sensor Technology Conference 2001, Enschede ; Conference date: 14-05-2001 Through 15-05-2001",

}

TY - GEN

T1 - Fabrication of mechanical structures using macro-porous silicon

AU - Ohji, H

AU - French, PJ

AU - Izuo, S

AU - Tsutsumi, K

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7923-7012-0

SP - 95

EP - 100

BT - Proceedings

A2 - M Elwenspoek, null

PB - Kluwer

CY - Dordrecht

T2 - Sensor Technology Conference 2001, Enschede

Y2 - 14 May 2001 through 15 May 2001

ER -