Fabrication of nanochannels using glass to glass anodic bonding

VG Kutchoukov, FPJ Laugere, W van der Vlist, L Pakula, Y Garini, PFA Alkemade, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationTRANSDUCERS'03 Twelfth international conference on solid-state sensors, actuators and microsystems
Editors s.n.
Place of PublicationPiscataway
PublisherIEEE Society
Pages1327-1330
Number of pages4
ISBN (Print)0-7803-7731-1
Publication statusPublished - 2003
EventTwelfth international conference on solid-state sensors, actuators and microsystems, Boston, USA - Piscataway
Duration: 8 Jun 200312 Jun 2003

Publication series

Name
PublisherIEEE

Conference

ConferenceTwelfth international conference on solid-state sensors, actuators and microsystems, Boston, USA
Period8/06/0312/06/03

Keywords

  • Conf.proc. > 3 pag

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