Fabrication of nanochannels using glass to glass anodic bonding

VG Kutchoukov; FPJ Laugere; W van der Vlist; L Pakula; Y Garini; PFA Alkemade; A Bossche

Fabrication of nanochannels using glass to glass anodic bonding

VG Kutchoukov, FPJ Laugere, W van der Vlist, L Pakula, Y Garini, PFA Alkemade, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	TRANSDUCERS'03 Twelfth international conference on solid-state sensors, actuators and microsystems
Editors	s.n.
Place of Publication	Piscataway
Publisher	IEEE
Pages	1327-1330
Number of pages	4
ISBN (Print)	0-7803-7731-1
Publication status	Published - 2003
Event	Twelfth international conference on solid-state sensors, actuators and microsystems, Boston, USA - Piscataway Duration: 8 Jun 2003 → 12 Jun 2003

Publication series

Name
Publisher	IEEE

Conference

Conference	Twelfth international conference on solid-state sensors, actuators and microsystems, Boston, USA
Period	8/06/03 → 12/06/03

Bibliographical note

CD-ROM

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{9963825aa2f14126b4e9e15b030c0e20,

title = "Fabrication of nanochannels using glass to glass anodic bonding",

keywords = "Conf.proc. > 3 pag",

author = "VG Kutchoukov and FPJ Laugere and {van der Vlist}, W and L Pakula and Y Garini and PFA Alkemade and A Bossche",

note = "CD-ROM; Twelfth international conference on solid-state sensors, actuators and microsystems, Boston, USA ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-7803-7731-1",

publisher = "IEEE",

pages = "1327--1330",

editor = "s.n.",

booktitle = "TRANSDUCERS'03 Twelfth international conference on solid-state sensors, actuators and microsystems",

address = "United States",

}

Kutchoukov, VG, Laugere, FPJ, van der Vlist, W, Pakula, L, Garini, Y, Alkemade, PFA & Bossche, A 2003, Fabrication of nanochannels using glass to glass anodic bonding. in s.n. (ed.), TRANSDUCERS'03 Twelfth international conference on solid-state sensors, actuators and microsystems. IEEE, Piscataway, pp. 1327-1330, Twelfth international conference on solid-state sensors, actuators and microsystems, Boston, USA, 8/06/03.

Fabrication of nanochannels using glass to glass anodic bonding. / Kutchoukov, VG; Laugere, FPJ; van der Vlist, W et al.
TRANSDUCERS'03 Twelfth international conference on solid-state sensors, actuators and microsystems. ed. / s.n. Piscataway: IEEE, 2003. p. 1327-1330.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Fabrication of nanochannels using glass to glass anodic bonding

AU - Kutchoukov, VG

AU - Laugere, FPJ

AU - van der Vlist, W

AU - Pakula, L

AU - Garini, Y

AU - Alkemade, PFA

AU - Bossche, A

N1 - CD-ROM

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-7731-1

SP - 1327

EP - 1330

BT - TRANSDUCERS'03 Twelfth international conference on solid-state sensors, actuators and microsystems

A2 - s.n., null

PB - IEEE

CY - Piscataway

T2 - Twelfth international conference on solid-state sensors, actuators and microsystems, Boston, USA

Y2 - 8 June 2003 through 12 June 2003

ER -