@inproceedings{3c749adb298344b18ca7bf53e416a7d0,
title = "Fabrication of nanochannels with nearly flat walls and embedded titanium nitride electrodes for nano bio sensing",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "S Mokkapati and L Zhang and J Bastemeijer and JR Mollinger and A Bossche",
year = "2009",
language = "Undefined/Unknown",
isbn = "2-907801-08-2",
publisher = "MME",
pages = "01--04",
editor = "s.n.",
booktitle = "Fabrication of nanochannels with nearly flat walls and embedded titanium nitride electrodes for nano bio sensing",
note = "MME 2009 ; Conference date: 20-09-2009 Through 22-09-2009",
}