Fabrication of nanofluidic devices in glass with polysilicon electrodes

VG Kutchoukov, L Pakula, GOF Parikesit, Y Garini, LK Nanver, A Bossche

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)602-607
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Publication statusPublished - 2005

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