@article{be59a14bf32e4587a273a3ee32551713,
title = "Fabrication of nanofluidic devices in glass with polysilicon electrodes",
keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",
author = "VG Kutchoukov and L Pakula and GOF Parikesit and Y Garini and LK Nanver and A Bossche",
note = "100% EI",
year = "2005",
doi = "doi:10.1016/j.sna.2005.02.030",
language = "Undefined/Unknown",
volume = "123-124",
pages = "602--607",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}