Fabrication of nanofluidic devices using glass-to-glass anodic bonding

VG Kutchoukov, F. Laugere, W van der Vlist, L Pakula, Y Garini, A Bossche

Research output: Contribution to journalArticleScientificpeer-review

79 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)521-527
Number of pages7
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume114
Issue number2-3
Publication statusPublished - 2004

Bibliographical note

phpub 18

Keywords

  • ZX CWTS 1.00 <= JFIS < 3.00

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