Fabrication of tunable clamped-clamped microresonators in silicon

R. van Leeuwen, PHR Lew, EWJM van der Drift, HSJ van der Zant, WJ Venstra

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)75011-1-75011-5
JournalJournal of Micromechanics and Microengineering
Issue number7
Publication statusPublished - 2011


  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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