| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 435-438 |
| Number of pages | 4 |
| Journal | Microelectronic Engineering |
| Volume | 46 |
| Publication status | Published - 1999 |
Fabrication of Ultra-thin freestanding chromium foils supported by a Si3N4 Membrane-structure with search pattern.
IS Stepanov, RH van Aken, MR Zuiddam, CW Hagen
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)