Fabrication of Ultra-thin freestanding chromium foils supported by a Si3N4 Membrane-structure with search pattern

IS Stepanov, RH van Aken, CW Hagen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationMicro and Nano Engineering 98
    Pages181-182
    Number of pages2
    Publication statusPublished - 1998

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