Fabrication of ultra-thin freestanding chromium foils supported by Si3N4 membrane structure with search pattern.

IS Stepanov, RH van Aken, MR Zuiddam, CW Hagen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings International Conference of Micro- & Nano- Engineering.
EditorsL van den Hove, M van Rossum, K Ronse
Number of pages4
Publication statusPublished - 1999

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