Fabrication of ultra-thin freestanding chromium foils supported by Si3N4 membrane structure with search pattern.

IS Stepanov, RH van Aken, MR Zuiddam, CW Hagen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings International Conference of Micro- & Nano- Engineering.
Editors	L van den Hove, M van Rossum, K Ronse
Pages	435-438
Number of pages	4
Publication status	Published - 1999

Cite this

@inproceedings{fd41bc0e64024586b47fbf66759a2088,

title = "Fabrication of ultra-thin freestanding chromium foils supported by Si3N4 membrane structure with search pattern.",

author = "IS Stepanov and {van Aken}, RH and MR Zuiddam and CW Hagen",

year = "1999",

language = "Undefined/Unknown",

pages = "435--438",

editor = "{van den Hove}, L and {van Rossum}, M and K Ronse",

booktitle = "Proceedings International Conference of Micro- & Nano- Engineering.",

}

Fabrication of ultra-thin freestanding chromium foils supported by Si3N4 membrane structure with search pattern. / Stepanov, IS; van Aken, RH; Zuiddam, MR et al.
Proceedings International Conference of Micro- & Nano- Engineering.. ed. / L van den Hove; M van Rossum; K Ronse. 1999. p. 435-438.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Fabrication of ultra-thin freestanding chromium foils supported by Si3N4 membrane structure with search pattern.

AU - Stepanov, IS

AU - van Aken, RH

AU - Zuiddam, MR

AU - Hagen, CW

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 435

EP - 438

BT - Proceedings International Conference of Micro- & Nano- Engineering.

A2 - van den Hove, L

A2 - van Rossum, M

A2 - Ronse, K

ER -