Fabrication of Ultra-thin freestanding chromium foils supported by a Si3N4 Membrane-structure with search pattern.

IS Stepanov, RH van Aken, MR Zuiddam, CW Hagen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	435-438
Number of pages	4
Journal	Microelectronic Engineering
Volume	46
Publication status	Published - 1999

Cite this

@article{449409b414a44ae1a60d79f1931c18dd,

title = "Fabrication of Ultra-thin freestanding chromium foils supported by a Si3N4 Membrane-structure with search pattern.",

author = "IS Stepanov and \{van Aken\}, RH and MR Zuiddam and CW Hagen",

year = "1999",

language = "Undefined/Unknown",

volume = "46",

pages = "435--438",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Fabrication of Ultra-thin freestanding chromium foils supported by a Si3N4 Membrane-structure with search pattern.

AU - Stepanov, IS

AU - van Aken, RH

AU - Zuiddam, MR

AU - Hagen, CW

PY - 1999

Y1 - 1999

UR - https://www.scopus.com/pages/publications/0033130784

M3 - Article

SN - 0167-9317

VL - 46

SP - 435

EP - 438

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -