Fabrication technology for micromachined spatial light modulators

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE; integrated optical devices: fabrication and testing
Editors	GC Righini
Place of Publication	Bellingham
Publisher	The International Society for Optical Engineering
Pages	219-226
Number of pages	8
ISBN (Print)	0-8194-4739-0
Publication status	Published - 2003
Event	Integrated optical devices: fabrication and testing, Brugge, Belgium - Bellingham Duration: 30 Oct 2002 → 1 Nov 2002

Name
Publisher	The International Society for Optical Engineering

Name
Volume	4944

Conference	Integrated optical devices: fabrication and testing, Brugge, Belgium
Period	30/10/02 → 1/11/02

Keywords

@inproceedings{e1a5d4011fab4e4b97fe8db990d0b41e,

title = "Fabrication technology for micromachined spatial light modulators",

keywords = "Conf.proc. > 3 pag",

author = "S Sakarya and GV Vdovin and PM Sarro",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-8194-4739-0",

publisher = "The International Society for Optical Engineering",

pages = "219--226",

editor = "GC Righini",

booktitle = "Proceedings of SPIE; integrated optical devices: fabrication and testing",

note = "Integrated optical devices: fabrication and testing, Brugge, Belgium ; Conference date: 30-10-2002 Through 01-11-2002",

}

Fabrication technology for micromachined spatial light modulators. / Sakarya, S; Vdovin, GV ; Sarro, PM.
Proceedings of SPIE; integrated optical devices: fabrication and testing. ed. / GC Righini. Bellingham: The International Society for Optical Engineering, 2003. p. 219-226.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Fabrication technology for micromachined spatial light modulators

AU - Sakarya, S

AU - Vdovin, GV

AU - Sarro, PM

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-8194-4739-0

SP - 219

EP - 226

BT - Proceedings of SPIE; integrated optical devices: fabrication and testing

A2 - Righini, GC

PB - The International Society for Optical Engineering

CY - Bellingham

T2 - Integrated optical devices: fabrication and testing, Brugge, Belgium

Y2 - 30 October 2002 through 1 November 2002

ER -