Fabrication technology for micromachined spatial light modulators

S Sakarya, GV Vdovin, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE; integrated optical devices: fabrication and testing
EditorsGC Righini
Place of PublicationBellingham
PublisherThe International Society for Optical Engineering
Pages219-226
Number of pages8
ISBN (Print)0-8194-4739-0
Publication statusPublished - 2003
EventIntegrated optical devices: fabrication and testing, Brugge, Belgium - Bellingham
Duration: 30 Oct 20021 Nov 2002

Publication series

Name
PublisherThe International Society for Optical Engineering
Name
Volume4944

Conference

ConferenceIntegrated optical devices: fabrication and testing, Brugge, Belgium
Period30/10/021/11/02

Keywords

  • Conf.proc. > 3 pag

Cite this

Sakarya, S., Vdovin, GV., & Sarro, PM. (2003). Fabrication technology for micromachined spatial light modulators. In GC. Righini (Ed.), Proceedings of SPIE; integrated optical devices: fabrication and testing (pp. 219-226). The International Society for Optical Engineering.