Fabrication technology for through-wafer interconnects

VG Kutchoukov

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	French, P.J., Supervisor Bossche, A., Advisor
Award date	15 Apr 2002
Place of Publication	Delft
Publisher	Eburon Academic Publishers
Print ISBNs	90-5166-897-X
Publication status	Published - 2002

Keywords

@phdthesis{31bfdcc7828a44bbb44d72fc53e33d5f,

title = "Fabrication technology for through-wafer interconnects",

keywords = "Diss. prom. aan TU Delft",

author = "VG Kutchoukov",

year = "2002",

language = "Undefined/Unknown",

isbn = "90-5166-897-X",

publisher = "Eburon Academic Publishers",

address = "Netherlands",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}