Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers

Mohammadamir Ghaderi, Ehsan Karimi, N. Pelin Ayerden, Reinoud F. Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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Abstract

Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patterns. Results in literature are usually based on structures of nominal dimensions, despite the significant effect of fabrication tolerances on performance. This research aims to identify the main sources of uncertainty and to investigate their effect, notably that of an irregular surface quality (i.e., roughness) of the thin metallic layer and the lithography related variations in size and shape. The effect of the shape and positioning of the resonance peak was investigated and validated using mid-infrared metamaterial absorbers. This sensitivity analysis is essential to the batch fabrication of metamaterial absorbers for MEMS applications.
Original languageEnglish
Title of host publicationProceedings of Eurosensors 2017
Pages1-4
Number of pages4
DOIs
Publication statusPublished - 2017
EventEurosensors 2017: 31st Conference - Paris, France
Duration: 3 Sep 20176 Sep 2017
Conference number: 31
http://www.eurosensors2017.eu/

Publication series

NameProceedings
PublisherMDPI
Number4
Volume1
ISSN (Print)2504-3900

Conference

ConferenceEurosensors 2017
CountryFrance
CityParis
Period3/09/176/09/17
Internet address

Keywords

  • metamaterial absorber
  • mid-infrared
  • UV lithography
  • tolerance sensitivity
  • fabrication

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