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Abstract
Optical inspection of periodic nanostructures is a major challenge in the semiconductor industry due to constantly decreasing critical dimensions. In this paper we combine coherent Fourier scatterometry (CFS) with a sectioning mask for subwavelength grating parameter determination. By selecting only the most sensitive regions of the scattered light in the Fourier plane, one can retrieve grating parameters faster and with higher sensitivity than previous approaches. Moreover, the full process of CFS using focused light is explained and implemented in a subwavelength grating regime. The results of using transverse magnetic polarized input fields together with the proposed sectioning mask are presented and compared to the non-mask case.
Original language | English |
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Article number | 104005 |
Number of pages | 6 |
Journal | Measurement Science and Technology |
Volume | 31 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2020 |
Keywords
- beam shaping
- coherent Fourier scatterometry
- diffraction
- grating
- optical inspection
- periodic nanostructure
- scattered light
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Dive into the research topics of 'Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry'. Together they form a unique fingerprint.Projects
- 1 Finished
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LEaDing Fellows
Gutierrez, A., Dols Perez, A., Bae, D., Sahoo, H., Wang, W., Lam, K. L., Raimondo, A., Steffelbauer, D. B., Lesne, E. L., Ragno, E., Amador, G. J., Šiaudinyte, L., Sand, M., Robinson Garcia, N., Abil, Z., Purkarthofer, E., Noardo, F., Tasić, J. K., Marin, L., Angeloni, L., loddo, M., Stockill, R. H. J., Franklin, S. W., Hensen, B. J., Dennis, M. J., Afroza Islam, S. T., Kim, T., Manzaneque Garcia, T., Tiringer, U., Marques Penha, F., Esteban Jurado, C., Timmermans, E., McCrum, I. T., Pool, F., Forn-Cuní, G., Will, G., Barrett, H. E., Everett, J. A. C., Kostenzer, J., Luksenburg, J., Hirvasniemi, J., Desai, J., Ruibal, P., Albury, N. J., March, R., Eichengreen, A., Muok, A. R., Cochrane, A., Ravesteijn, B., Riumalló Herl, C. J., Meeusen, C., Biaggi, C., Granger, C., Cecil, C., Fosch Villaronga, E., Sánchez López, E. S., Loehrer, E., da Costa Gonçalves, F., Giardina, F., Wu, H., Gleitz, H. & Khatri, I.
2/01/17 → 1/05/22
Project: Research