@article{c859abadaf02452fbbb0984feb9477cc,
title = "Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 1. Optical absorptivity",
keywords = "CWTS 0.75 <= JFIS < 2.00",
author = "F jutzi and DHB Wicaksono and G Pandraud and {de rooij}, N and PJ French",
year = "2009",
language = "Undefined/Unknown",
volume = "152",
pages = "119--125",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}