Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 1. Optical absorptivity

F jutzi, DHB Wicaksono, G Pandraud, N de rooij, PJ French

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)119-125
Number of pages7
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Publication statusPublished - 2009


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