@article{20aa9fbc8ec74253bed67a435f03f76b,
title = "Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane-part 2.Thermal property and sensitivity",
keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "F jutzi and DHB Wicaksono and G Pandraud and {de rooij}, N and PJ French",
year = "2009",
language = "Undefined/Unknown",
volume = "A152-2(2)",
pages = "126--138",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}