Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane-part 2.Thermal property and sensitivity

F jutzi, DHB Wicaksono, G Pandraud, N de rooij, PJ French

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)126-138
Number of pages13
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
VolumeA152-2(2)
Publication statusPublished - 2009

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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