Fast deposition of microcrystalline silicon with an expanding thermal plasma

C Smit; EAG Hamers; BA Korevaar; RACMM Swaaij; MCM van de Sanden

Fast deposition of microcrystalline silicon with an expanding thermal plasma

C Smit, EAG Hamers, BA Korevaar, RACMM Swaaij, MCM van de Sanden

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2001: proceedings CD-ROM
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	182-185
Number of pages	4
ISBN (Print)	90-73461-29-4
Publication status	Published - 2001
Event	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

ZX Int.klas.verslagjaar < 2002

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{decbc76f4d3247c1a19fc1ea8f5e5d2b,

title = "Fast deposition of microcrystalline silicon with an expanding thermal plasma",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "C Smit and EAG Hamers and BA Korevaar and RACMM Swaaij and {van de Sanden}, MCM",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-29-4",

publisher = "STW Technology Foundation",

pages = "182--185",

booktitle = "SAFE 2001: proceedings CD-ROM",

note = "null ; Conference date: 28-11-2001 Through 30-11-2001",

}

Smit, C, Hamers, EAG, Korevaar, BA, Swaaij, RACMM & van de Sanden, MCM 2001, Fast deposition of microcrystalline silicon with an expanding thermal plasma. in SAFE 2001: proceedings CD-ROM. STW Technology Foundation, Utrecht, pp. 182-185, Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven, 28/11/01.

TY - GEN

T1 - Fast deposition of microcrystalline silicon with an expanding thermal plasma

AU - Smit, C

AU - Hamers, EAG

AU - Korevaar, BA

AU - Swaaij, RACMM

AU - van de Sanden, MCM

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-29-4

SP - 182

EP - 185

BT - SAFE 2001: proceedings CD-ROM

PB - STW Technology Foundation

CY - Utrecht

Y2 - 28 November 2001 through 30 November 2001

ER -