Fast deposition of microcrystalline silicon with an expanding thermal plasma

C Smit, EAG Hamers, BA Korevaar, RACMM Swaaij, MCM van de Sanden

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)98-102
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume299/302
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS 1.00 <= JFIS < 3.00

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