Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)074020(1)-074020(5)
JournalJournal of Micromechanics and Microengineering
Volume19
Publication statusPublished - 2009

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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