Feedback oriented identification for enhabced and robust control. A fractional approach applied to a wafer stage

R de Callafon

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Bosgra, Okko, Supervisor
  • van den Hof, Paul, Advisor
Award date1 Jan 1998
Place of PublicationDelft
Publication statusPublished - 1998


  • ZX Int.klas.verslagjaar < 2002

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