@inproceedings{5f4adb46c4dd425d8d77e4dbd2ddbfeb,
title = "FEM study on the dependence of resonant frequency shift on mechanical stress of thin film resonator",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "SS Lee and R Kazinczi and JR Mollinger and MJ Vellekoop and A Bossche",
year = "2001",
language = "Undefined/Unknown",
isbn = "90-73461-29-4",
publisher = "STW Technology Foundation",
pages = "817--820",
booktitle = "SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Fututre Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology",
note = "SAFE ProRISC SeSens 2001, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}