Fiber-coupled displacement interferometry without periodic nonlinearity

JD Ellis, AJH Meskers, JW Spronck, RH Munnig Schmidt

Research output: Contribution to journalArticleScientificpeer-review

36 Citations (Scopus)

Abstract

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinarity in both free-space and fiber-delivered variants.
Original languageEnglish
Pages (from-to)3584-3586
Number of pages3
JournalOptics Letters
Volume36
Issue number18
Publication statusPublished - 2011

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

Fingerprint

Dive into the research topics of 'Fiber-coupled displacement interferometry without periodic nonlinearity'. Together they form a unique fingerprint.

Cite this