Fiber coupled sub nanometer displacement interferometry without periodic nonlinearity

AJH Meskers, JD Ellis, JW Spronck, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

Displacement interferometers are widely used in precision engineering and metrology applications. For multi-axis systems, free space delivery of the optical beams requires high tolerance pointing stability and couples the source to the interferometer location. Fiber delivery is desired to decouple the source and interferometer but configurations which have to be used for this, contribute typical errors such as periodic nonlinearity. In this paper, we describe a fiber-coupled Joo-type interferometer. Spatial separation of the input beams in this type of interferometer eliminate periodic nonlinearities. This is contrasted by typical heterodyne interferometer systems which have two orthogonal, coaxial beams with a difference frequency. We present the interferometer design, discuss the fiber deployment, and compare free-space and fiber-coupled versions. The results indicate that fiberinduced disturbances are rejected as theory predicts and no periodic nonlinearity was detected.
Original languageEnglish
Title of host publicationProceedings of the 10th International Symposium of Measurement Technology and Intelligent Instruments, June 29-July 2, 2011, KAIST, Daejeon, Korea
Editors n.a.
Place of PublicationKAIST, Daejeon, Korea
PublisherISMTII
Pages1-6
Number of pages6
ISBN (Print)n.a.
Publication statusPublished - 2011
Event10th International Symposium of Measurement Technology and Intelligent Instruments, KAIST, Daejeon, Korea - KAIST, Daejeon, Korea
Duration: 29 Jun 20112 Jul 2011

Publication series

Name
PublisherISMTII

Conference

Conference10th International Symposium of Measurement Technology and Intelligent Instruments, KAIST, Daejeon, Korea
Period29/06/112/07/11

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Fingerprint Dive into the research topics of 'Fiber coupled sub nanometer displacement interferometry without periodic nonlinearity'. Together they form a unique fingerprint.

Cite this