TY - GEN
T1 - Fiber coupled sub nanometer displacement interferometry without periodic nonlinearity
AU - Meskers, AJH
AU - Ellis, JD
AU - Spronck, JW
AU - Munnig Schmidt, RH
PY - 2011
Y1 - 2011
N2 - Displacement interferometers are widely used in precision engineering and metrology applications. For multi-axis systems, free space delivery of the optical beams requires high tolerance pointing stability and couples the source to the interferometer location. Fiber delivery is desired to decouple the source and interferometer but configurations which have to be used for this, contribute typical errors such as periodic nonlinearity. In this paper, we describe a fiber-coupled Joo-type interferometer. Spatial separation of the input beams in this type of interferometer eliminate periodic nonlinearities. This is contrasted by typical heterodyne interferometer systems which have two orthogonal, coaxial beams with a difference frequency. We present the interferometer design,
discuss the fiber deployment, and compare free-space and fiber-coupled versions. The results indicate that fiberinduced disturbances are rejected as theory predicts and no periodic nonlinearity was detected.
AB - Displacement interferometers are widely used in precision engineering and metrology applications. For multi-axis systems, free space delivery of the optical beams requires high tolerance pointing stability and couples the source to the interferometer location. Fiber delivery is desired to decouple the source and interferometer but configurations which have to be used for this, contribute typical errors such as periodic nonlinearity. In this paper, we describe a fiber-coupled Joo-type interferometer. Spatial separation of the input beams in this type of interferometer eliminate periodic nonlinearities. This is contrasted by typical heterodyne interferometer systems which have two orthogonal, coaxial beams with a difference frequency. We present the interferometer design,
discuss the fiber deployment, and compare free-space and fiber-coupled versions. The results indicate that fiberinduced disturbances are rejected as theory predicts and no periodic nonlinearity was detected.
KW - conference contrib. refereed
KW - Conf.proc. > 3 pag
M3 - Conference contribution
SN - n.a.
SP - 1
EP - 6
BT - Proceedings of the 10th International Symposium of Measurement Technology and Intelligent Instruments, June 29-July 2, 2011, KAIST, Daejeon, Korea
A2 - n.a., null
PB - ISMTII
CY - KAIST, Daejeon, Korea
T2 - 10th International Symposium of Measurement Technology and Intelligent Instruments, KAIST, Daejeon, Korea
Y2 - 29 June 2011 through 2 July 2011
ER -