Field emission photocathode array for high throughput lithography.

AHV van Veen, BJ Kampherbeek, MJJ Wieland, P Kruit

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    1 Citation (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationProceedings of the 14th International Vacuum Microeelectronics Conference (IVMC).
    Number of pages2
    Publication statusPublished - 2001


    • ZX Int.klas.verslagjaar < 2002

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