Field emission photocathode array for high throughput lithography.

AHV van Veen, BJ Kampherbeek, MJJ Wieland, P Kruit

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 14th International Vacuum Microeelectronics Conference (IVMC).
Pages	127-128
Number of pages	2
Publication status	Published - 2001

Keywords

@inproceedings{4fb65f1e221942cab2ec524c72428f75,

title = "Field emission photocathode array for high throughput lithography.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Veen}, AHV and BJ Kampherbeek and MJJ Wieland and P Kruit",

year = "2001",

language = "Undefined/Unknown",

pages = "127--128",

booktitle = "Proceedings of the 14th International Vacuum Microeelectronics Conference (IVMC).",

}