Field emission photocathode array for lithography system and lithography system provided with such an array.

BJ Kampherbeek (Inventor), MJJ Wieland (Inventor), P Kruit (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberPCT/NL00/00657
    Priority date1/01/00
    Publication statusPublished - 2001

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