Original language | Undefined/Unknown |
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Patent number | PCT/NL00/00657 |
Priority date | 1/01/00 |
Publication status | Published - 2001 |
Field emission photocathode array for lithography system and lithography system provided with such an array.
BJ Kampherbeek (Inventor), MJJ Wieland (Inventor), P Kruit (Inventor)
Research output: Patent