Original language | Undefined/Unknown |
---|---|
Patent number | PCT/NL00/00657 |
Priority date | 15/09/00 |
Publication status | Published - 2000 |
Field emission photocathode array for multibeam electron lithography.
BJ Kampherbeek (Inventor), MJJ Wieland (Inventor), P Kruit (Inventor)
Research output: Patent