Field emission photocathode array for multibeam electron lithography.

BJ Kampherbeek (Inventor), MJJ Wieland (Inventor), P Kruit (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberPCT/NL00/00657
    Priority date15/09/00
    Publication statusPublished - 2000

    Cite this