Field Emission Photocathode Arrray for multibeam electron lithography.

MJJ Wieland, BJ Kampherbeek, P Addessi, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)155-161
    Number of pages7
    JournalMicroelectronic Engineering
    Volume57-58
    Publication statusPublished - 2001

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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