Field Emission Photocathode Arrray for multibeam electron lithography.

MJJ Wieland, BJ Kampherbeek, P Addessi, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	155-161
Number of pages	7
Journal	Microelectronic Engineering
Volume	57-58
Publication status	Published - 2001

ISSN 0167-9317

Keywords

@article{446818fdc3e143e2b77fab18956bdfc3,

title = "Field Emission Photocathode Arrray for multibeam electron lithography.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "MJJ Wieland and BJ Kampherbeek and P Addessi and P Kruit",

note = "ISSN 0167-9317",

year = "2001",

language = "Undefined/Unknown",

volume = "57-58",

pages = "155--161",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}