Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction

C Schaffnit, E Sabouret, CA van de Jeugd, TGM Oosterlaken, GCAM Janssen, S Radelaar

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Technische Universiteit Delft
Number of pages	75
Publication status	Published - 1997

Name
Publisher	Technische Universiteit Delft

Cite this

@book{1be3d01de5774ebc838112d7dff48cc5,

title = "Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction",

author = "C Schaffnit and E Sabouret and {van de Jeugd}, CA and TGM Oosterlaken and GCAM Janssen and S Radelaar",

year = "1997",

language = "Undefined/Unknown",

publisher = "Technische Universiteit Delft",

}

TY - BOOK

T1 - Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction

AU - Schaffnit, C

AU - Sabouret, E

AU - van de Jeugd, CA

AU - Oosterlaken, TGM

AU - Janssen, GCAM

AU - Radelaar, S

PY - 1997

Y1 - 1997

M3 - Report

BT - Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction

PB - Technische Universiteit Delft

CY - Delft

ER -