Final Report on the materials properties of W and WSI2 produced with the WF6/Poly-Si Displacement reaction

C Schaffnit, E Sabouret, CA van de Jeugd, TGM Oosterlaken, GCAM Janssen, S Radelaar

    Research output: Book/ReportReportProfessional

    Original languageUndefined/Unknown
    Place of PublicationDelft
    PublisherDelft University of Technology
    Number of pages75
    Publication statusPublished - 1997

    Publication series

    Name
    PublisherTechnische Universiteit Delft

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