Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator

Po Ju Chen, Philip Engel, Adam Mazur, Clément Abélard, H. Paul Urbach

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

31 Downloads (Pure)


Accurate optical modeling for design and optimization of liquid crystal on silicon spatial light modulators (LCoS SLMs) is important for phase-related applications. Traditional matrix method cannot accurately predict the optical performance when the LC distribution is complex, therefore the rigorous finite element method (FEM) is preferred. However, the optical modeling of LCoS is a multidimensional problem, which is difficult to simulate with FEM. Here, we present the development of an improved FEM by combining the scattering matrix method with the domain decomposition method to reduce the computational burden for optical simulation of LCoS. Furthermore, a 2D simulation example with phase grating displayed on LCoS is presented and compared with experiment.

Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publicationEmerging Liquid Crystal Technologies XV
EditorsLiang-Chy Chien, Dirk J. Broer, Igor Musevic
Number of pages9
ISBN (Electronic)9781510633698
Publication statusPublished - 2020
EventEmerging Liquid Crystal Technologies XV 2020 - San Francisco, United States
Duration: 3 Feb 20205 Feb 2020

Publication series

ISSN (Print)0277-786X


ConferenceEmerging Liquid Crystal Technologies XV 2020
CountryUnited States
CitySan Francisco


  • Beam steering
  • Diffractive optics
  • Finite element method
  • LCoS
  • Liquid Crystal on Silicon
  • Spatial light modulator

Fingerprint Dive into the research topics of 'Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator'. Together they form a unique fingerprint.

Cite this