Finite Element Modeling of Electro-Mechanical Coupling in Capactive Micro-Systems

V Rochus; DJ Rixen; JC Golinval

Finite Element Modeling of Electro-Mechanical Coupling in Capactive Micro-Systems

V Rochus, DJ Rixen, JC Golinval

Dynamics of Micro and Nano Systems

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show
Editors	NSTI
Place of Publication	Liege
Publisher	Natotech 2005
Pages	704-707
Number of pages	4
ISBN (Print)	0-967985-4-9
Publication status	Published - 2005

Publication series

Name
Publisher	Natotech 2005

Name
Volume	3

Bibliographical note

Niet eerder opgevoerd

Keywords

Conf.proc. > 3 pag

Cite this

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title = "Finite Element Modeling of Electro-Mechanical Coupling in Capactive Micro-Systems",

keywords = "Conf.proc. > 3 pag",

author = "V Rochus and DJ Rixen and JC Golinval",

note = "Niet eerder opgevoerd",

year = "2005",

language = "Undefined/Unknown",

isbn = "0-967985-4-9",

publisher = "Natotech 2005",

pages = "704--707",

editor = "NSTI",

booktitle = "Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show",

}

TY - GEN

T1 - Finite Element Modeling of Electro-Mechanical Coupling in Capactive Micro-Systems

AU - Rochus, V

AU - Rixen, DJ

AU - Golinval, JC

N1 - Niet eerder opgevoerd

PY - 2005

Y1 - 2005

KW - Conf.proc. > 3 pag

UR - https://www.scopus.com/pages/publications/32044474233

M3 - Conference contribution

SN - 0-967985-4-9

SP - 704

EP - 707

BT - Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show

A2 - NSTI, null

PB - Natotech 2005

CY - Liege

ER -

Finite Element Modeling of Electro-Mechanical Coupling in Capactive Micro-Systems

Publication series

Bibliographical note

Keywords

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Cite this