First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

F Buja, J Kokorian, AV Sumant, WM van Spengen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular System
EditorsEPY Chiou, Z Wang, AT Ohta
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages77-80
ISBN (Print)978-1-4799-4727-0
DOIs
Publication statusPublished - 2014
EventIEEE-NEMS 2014, Hawaii, USA - Piscataway, NJ, USA
Duration: 13 Apr 201416 Apr 2014

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE-NEMS 2014, Hawaii, USA
Period13/04/1416/04/14

Keywords

  • Conf.proc. > 3 pag

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