First evaluation of new process steps with 0.25 micrometer design rules

? Lerme, Y Gobil, GCAM Janssen

    Research output: Book/ReportReportProfessional

    Original languageEnglish
    Place of PublicationDelft
    PublisherDelft University of Technology
    Number of pages3
    Publication statusPublished - 1996

    Publication series

    Name
    PublisherTechnische Universiteit Delft

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