Fixed order controller synthesis applied to the SIRE-T5 wafer-stage

CWJ Hol

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology WbMT
Number of pages43
Publication statusPublished - 2002

Publication series

Name
PublisherDelft University of Technology WbMT

Bibliographical note

Confidential

Keywords

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