Flexible microsystems

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


Flexible devices can be fabricated using organic materials which are made electrically active, or in semiconductors. Silicon is usually seen as a stiff material. However, the active part of the device is often only the top few microns and the rest of the device is for mechanical support. If we remove this bulk, we have a flexible devices, which can lead to many advantages. Recent years have seen the development of devices such as flexible displays and flexible sensors. Many of these devices use a combination of silicon, metals and polymers. This paper looks into the processing to fabricate these flexible devices and also the applications.

Original languageEnglish
Title of host publicationSmart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
EditorsT. Gessner
PublisherVerlag Wissenschaftliche Scripten
Number of pages8
ISBN (Electronic)978-395735040-4
Publication statusPublished - 2016
EventSmart Systems Integration 2016: International Conference and Exhibition on Integration Issues of Miniaturized Systems - Munich, Germany
Duration: 9 Mar 201610 Mar 2016


ConferenceSmart Systems Integration 2016
Abbreviated titleSSI 2016


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