Flexible microsystems

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

Flexible devices can be fabricated using organic materials which are made electrically active, or in semiconductors. Silicon is usually seen as a stiff material. However, the active part of the device is often only the top few microns and the rest of the device is for mechanical support. If we remove this bulk, we have a flexible devices, which can lead to many advantages. Recent years have seen the development of devices such as flexible displays and flexible sensors. Many of these devices use a combination of silicon, metals and polymers. This paper looks into the processing to fabricate these flexible devices and also the applications.

Original languageEnglish
Title of host publicationSmart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
EditorsT. Gessner
PublisherVerlag Wissenschaftliche Scripten
Pages181-188
Number of pages8
ISBN (Electronic)978-395735040-4
Publication statusPublished - 2016
EventSmart Systems Integration 2016: International Conference and Exhibition on Integration Issues of Miniaturized Systems - Munich, Germany
Duration: 9 Mar 201610 Mar 2016

Conference

ConferenceSmart Systems Integration 2016
Abbreviated titleSSI 2016
CountryGermany
CityMunich
Period9/03/1610/03/16

Fingerprint Dive into the research topics of 'Flexible microsystems'. Together they form a unique fingerprint.

Cite this