Flexible silicon micromachined structures for use in integrated spatial light modulators

S Sakarya; G Vdovin; PM Sarro

Flexible silicon micromachined structures for use in integrated spatial light modulators

S Sakarya, G Vdovin, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	861-864
Number of pages	4
ISBN (Print)	90-73461-29-4
Publication status	Published - 2001
Event	SAFE ProRISC SeSens 2001, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	SAFE ProRISC SeSens 2001, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

Sakarya, S., Vdovin, G., & Sarro, PM. (2001). Flexible silicon micromachined structures for use in integrated spatial light modulators. In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology (pp. 861-864). STW Technology Foundation.

Sakarya, S ; Vdovin, G ; Sarro, PM. / Flexible silicon micromachined structures for use in integrated spatial light modulators. SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht : STW Technology Foundation, 2001. pp. 861-864

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title = "Flexible silicon micromachined structures for use in integrated spatial light modulators",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Sakarya and G Vdovin and PM Sarro",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-29-4",

publisher = "STW Technology Foundation",

pages = "861--864",

booktitle = "SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology",

note = "SAFE ProRISC SeSens 2001, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",

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Sakarya, S, Vdovin, G & Sarro, PM 2001, Flexible silicon micromachined structures for use in integrated spatial light modulators. in SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. STW Technology Foundation, Utrecht, pp. 861-864, SAFE ProRISC SeSens 2001, Veldhoven, 28/11/01.

Flexible silicon micromachined structures for use in integrated spatial light modulators. / Sakarya, S; Vdovin, G; Sarro, PM.
SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation, 2001. p. 861-864.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Flexible silicon micromachined structures for use in integrated spatial light modulators

AU - Sakarya, S

AU - Vdovin, G

AU - Sarro, PM

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-29-4

SP - 861

EP - 864

BT - SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology

PB - STW Technology Foundation

CY - Utrecht

T2 - SAFE ProRISC SeSens 2001, Veldhoven

Y2 - 28 November 2001 through 30 November 2001

ER -

Sakarya S, Vdovin G, Sarro PM. Flexible silicon micromachined structures for use in integrated spatial light modulators. In SAFE - ProRISC - SeSens 2001: proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation. 2001. p. 861-864