Flow compensation in a MEMS dual-thermal conductivity detector for hydrogen sensing in natural gas

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Abstract

Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach presented here to reduce the flow dependence is based on the on-line flow compensation using two thin-film sensors on membranes in parallel on the same chip that are differentially operated. These are laterally identically, but with a different depth of the detection chamber, resulting in different quasi-static sensitivities to the thermal conductivity of the sample gas. The effects of conduction and convection in the structure have been studied using COMSOL Multiphysics. First prototypes have been fabricated and are presently tested.
Original languageEnglish
Title of host publicationProceedings of the 2015 Transducers - 2015 18th Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
EditorsTW Kenny, VM Bright
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1203-1206
Number of pages4
ISBN (Electronic)978-1-4799-8955-3
ISBN (Print)978-1-4799-8956-0
DOIs
Publication statusPublished - 6 Aug 2015
EventTRANSDUCERS 2015, Anchorage, USA - Piscataway
Duration: 21 Jun 201525 Jun 2015

Publication series

Name
PublisherIEEE

Conference

ConferenceTRANSDUCERS 2015, Anchorage, USA
Period21/06/1525/06/15

Keywords

  • Thermal conductivity
  • detector
  • flow compensation
  • Hydrogen sensor
  • MEMS

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