Flux dependence of oxygen-beam-induced ripple growth on silicon.

ZX Liu, PFA Alkemade

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{6a7460115125483f93263d6e0cd903ec,

title = "Flux dependence of oxygen-beam-induced ripple growth on silicon.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "ZX Liu and PFA Alkemade",

year = "2000",

language = "Undefined/Unknown",

volume = "79",

pages = "4334--4336",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "26",

}