Focused electron-beam-induced deposition of 3 nm dots in a scanning electron microscope

L. Kouwen, APJM Botman, CW Hagen

    Research output: Contribution to journalArticleScientificpeer-review

    70 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2149-2152
    Number of pages4
    JournalNano Letters: a journal dedicated to nanoscience and nanotechnology
    Volume9
    Publication statusPublished - 2009

    Keywords

    • CWTS JFIS >= 2.00

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