Focused electron-beam-induced deposition of 3 nm dots in a scanning electron microscope

L. Kouwen, APJM Botman, CW Hagen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2149-2152
Number of pages	4
Journal	Nano Letters: a journal dedicated to nanoscience and nanotechnology
Volume	9
Publication status	Published - 2009

Keywords

@article{9aba0276ba854da99f00061adc97a1e8,

title = "Focused electron-beam-induced deposition of 3 nm dots in a scanning electron microscope",

keywords = "CWTS JFIS >= 2.00",

author = "L. Kouwen and APJM Botman and CW Hagen",

year = "2009",

language = "Undefined/Unknown",

volume = "9",

pages = "2149--2152",

journal = "Nano Letters: a journal dedicated to nanoscience and nanotechnology",

issn = "1530-6984",

publisher = "American Chemical Society (ACS)",

}

TY - JOUR

T1 - Focused electron-beam-induced deposition of 3 nm dots in a scanning electron microscope

AU - Kouwen, L.

AU - Botman, APJM

AU - Hagen, CW

PY - 2009

Y1 - 2009

KW - CWTS JFIS >= 2.00

M3 - Article

SN - 1530-6984

VL - 9

SP - 2149

EP - 2152

JO - Nano Letters: a journal dedicated to nanoscience and nanotechnology

JF - Nano Letters: a journal dedicated to nanoscience and nanotechnology

ER -