@article{9b7cafbb0ee845e29502fad42b0145b8,
title = "Focused electron beam induced processing and the effect of substrate thickness revisited",
keywords = "CWTS 0.75 <= JFIS < 2.00",
author = "{van Dorp}, WF and A Beyer and M Mainka and A G{\"o}lzh{\"a}user and TW Hansen and JB Wagner and CW Hagen and {de Hosson}, JTM",
note = "art.no. 345301",
year = "2013",
language = "Undefined/Unknown",
volume = "24",
pages = "1--10",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing",
number = "34",
}