Formation of nanopores in a SiN/SiO2 membrane with an electron beam

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Keywords

@article{71077a0b29a449afb3478bfa7e8bd8ec,

title = "Formation of nanopores in a SiN/SiO2 membrane with an electron beam",

keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "MY Wu and D Krapf and M Zandbergen and HW Zandbergen and PE Batson",

year = "2005",

language = "Undefined/Unknown",

volume = "87",

pages = "113106--1--113106--3",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "11",

}

TY - JOUR

T1 - Formation of nanopores in a SiN/SiO2 membrane with an electron beam

AU - Wu, MY

AU - Krapf, D

AU - Zandbergen, M

AU - Zandbergen, HW

AU - Batson, PE

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 0003-6951

VL - 87

SP - 113106-1-113106-3

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -