@article{260df5bb1e7147c8a19ef6c0f0c1e5cb,
title = "Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing",
keywords = "academic journal papers, CWTS JFIS < 0.75",
author = "S Dobrovolskiy and AE Yakshin and FD Tichelaar and J Verhoeven and E Louis and F Bijkerk",
year = "2010",
doi = "10.1016/j.nimb.2009.12.022",
language = "English",
volume = "268",
pages = "560--567",
journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "6",
}