Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

P Petrik, N Kumar, M Fried, B Fodor, G Juhasz, SF Pereira, S Burger, HP Urbach

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Abstract

art.nr. 15002
Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalJournal of the European Optical Society - Rapid Publications
Volume10
DOIs
Publication statusPublished - 2015

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