Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

P Petrik; N Kumar; M Fried; B Fodor; G Juhasz; SF Pereira; S Burger; HP Urbach

doi:10.2971/jeos.2015.15002

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

P Petrik, N Kumar, M Fried, B Fodor, G Juhasz, SF Pereira, S Burger, HP Urbach

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)

Abstract

art.nr. 15002

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Journal of the European Optical Society - Rapid Publications
Volume	10
DOIs	https://doi.org/10.2971/jeos.2015.15002
Publication status	Published - 2015

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title = "Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry",

abstract = "art.nr. 15002",

author = "P Petrik and N Kumar and M Fried and B Fodor and G Juhasz and SF Pereira and S Burger and HP Urbach",

year = "2015",

doi = "10.2971/jeos.2015.15002",

language = "English",

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pages = "1--5",

journal = "Journal of the European Optical Society - Rapid Publications",

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publisher = "Institute of Physics Publishing",

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T1 - Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

AU - Petrik, P

AU - Kumar, N

AU - Fried, M

AU - Fodor, B

AU - Juhasz, G

AU - Pereira, SF

AU - Burger, S

AU - Urbach, HP

PY - 2015

Y1 - 2015

N2 - art.nr. 15002

AB - art.nr. 15002

UR - https://www.scopus.com/pages/publications/84922068325

U2 - 10.2971/jeos.2015.15002

DO - 10.2971/jeos.2015.15002

M3 - Article

SN - 1990-2573

VL - 10

SP - 1

EP - 5

JO - Journal of the European Optical Society - Rapid Publications

JF - Journal of the European Optical Society - Rapid Publications

ER -

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Abstract

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