Fourier optical measurement system (FOMS)

M Fischer (Inventor), J Melskens (Inventor), SGM Heirman (Inventor), MAA Elshinawy (Inventor)

Research output: Patent

Original languageEnglish
Patent numberWO 2015/080579
Priority date4/06/15
Publication statusPublished - 2015

Bibliographical note

OCT-13-068

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