| Original language | English |
|---|---|
| Qualification | Doctor of Philosophy |
| Awarding Institution |
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| Supervisors/Advisors |
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| Award date | 2 May 2012 |
| Print ISBNs | 978-94-6191-283-1 |
| Publication status | Published - 2012 |
From MEMS to NEMS: Scaling Cantilever Sensors
Research output: Thesis › Dissertation (TU Delft)