@phdthesis{d7e85d9b9ef24d16b9d72882a6177174,
title = "From Silicon toward Silicon Carbide Smart Integrated Sensors",
keywords = "harsh environment, smart sensors, system integration, wide-bandgap semiconductors, silicon carbide, MEMS, pressure sensors, particle sensors, suspended membranes, micromachining, SiC CMOS, monolithic integration",
author = "L.M. Middelburg",
year = "2020",
doi = "10.4233/uuid:d7e85d9b-9ef2-4d16-b9d7-2882a6177174",
language = "English",
type = "Dissertation (TU Delft)",
school = "Delft University of Technology",
}