From Silicon toward Silicon Carbide Smart Integrated Sensors

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Zhang, G.Q., Supervisor
Award date12 Oct 2020
DOIs
Publication statusPublished - 2020

Keywords

  • harsh environment
  • smart sensors
  • system integration
  • wide-bandgap semiconductors
  • silicon carbide
  • MEMS
  • pressure sensors
  • particle sensors
  • suspended membranes
  • micromachining
  • SiC CMOS
  • monolithic integration

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