Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

HW van Zeijl, JHCM Slabbekoorn, LK Nanver, PWL van Dijk, T Machielsen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	SAFE-ProRISC-SeSens 2000: proceedings
Editors	JP Veen
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	163-167
Number of pages	5
ISBN (Print)	90-73461-24-3
Publication status	Published - 2000

Name
Publisher	STW technology foundation

Keywords

@inproceedings{6851c623343e4177824385927a8ef9c9,

title = "Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "\{van Zeijl\}, HW and JHCM Slabbekoorn and LK Nanver and \{van Dijk\}, PWL and T Machielsen",

year = "2000",

language = "Undefined/Unknown",

isbn = "90-73461-24-3",

publisher = "STW Technology Foundation",

pages = "163--167",

editor = "\{JP Veen\}",

booktitle = "SAFE-ProRISC-SeSens 2000: proceedings",

}

TY - GEN

T1 - Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

AU - van Zeijl, HW

AU - Slabbekoorn, JHCM

AU - Nanver, LK

AU - van Dijk, PWL

AU - Machielsen, T

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-24-3

SP - 163

EP - 167

BT - SAFE-ProRISC-SeSens 2000: proceedings

A2 - JP Veen, null

PB - STW Technology Foundation

CY - Utrecht

ER -