Full-gap positioning of parallel-plate electrostatic MEMS using on-off control

L Mol; LA Rocha; E Cretu; RF Wolffenbuttel

Full-gap positioning of parallel-plate electrostatic MEMS using on-off control

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 2007 IEEE International Symposium on Industrial Electronics
Editors	s.n.
Place of Publication	Piscataway
Publisher	IEEE
Pages	1464-1468
Number of pages	5
ISBN (Print)	1-4244-0755-9
Publication status	Published - 2007
Event	2007 IEEE International Symposium on Industrial Electronics, Vigo, Spain - Piscataway Duration: 4 Jun 2007 → 7 Jun 2007

Publication series

Name
Publisher	IEEE

Conference

Conference	2007 IEEE International Symposium on Industrial Electronics, Vigo, Spain
Period	4/06/07 → 7/06/07

Keywords

Elektrotechniek
Techniek
professional journal papers
Conf.proc. > 3 pag

Cite this

@inproceedings{8187b31f16014f28b156677b85159241,

title = "Full-gap positioning of parallel-plate electrostatic MEMS using on-off control",

keywords = "Elektrotechniek, Techniek, professional journal papers, Conf.proc. > 3 pag",

author = "L Mol and LA Rocha and E Cretu and RF Wolffenbuttel",

year = "2007",

language = "Undefined/Unknown",

isbn = "1-4244-0755-9",

publisher = "IEEE",

pages = "1464--1468",

editor = "s.n.",

booktitle = "Proceedings of the 2007 IEEE International Symposium on Industrial Electronics",

address = "United States",

note = "2007 IEEE International Symposium on Industrial Electronics, Vigo, Spain ; Conference date: 04-06-2007 Through 07-06-2007",

}

TY - GEN

T1 - Full-gap positioning of parallel-plate electrostatic MEMS using on-off control

AU - Mol, L

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - professional journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-4244-0755-9

SP - 1464

EP - 1468

BT - Proceedings of the 2007 IEEE International Symposium on Industrial Electronics

A2 - s.n., null

PB - IEEE

CY - Piscataway

T2 - 2007 IEEE International Symposium on Industrial Electronics, Vigo, Spain

Y2 - 4 June 2007 through 7 June 2007

ER -