Full-gap positioning of parallel-plate electrostatic MEMS using on-off control

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

5 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of the 2007 IEEE International Symposium on Industrial Electronics
Editors s.n.
Place of PublicationPiscataway
PublisherIEEE Society
Pages1464-1468
Number of pages5
ISBN (Print)1-4244-0755-9
Publication statusPublished - 2007
Event2007 IEEE International Symposium on Industrial Electronics, Vigo, Spain - Piscataway
Duration: 4 Jun 20077 Jun 2007

Publication series

Name
PublisherIEEE

Conference

Conference2007 IEEE International Symposium on Industrial Electronics, Vigo, Spain
Period4/06/077/06/07

Keywords

  • Elektrotechniek
  • Techniek
  • professional journal papers
  • Conf.proc. > 3 pag

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